Characterization of cyclic dust growth in a low-pressure, radio-frequency driven argon-hexamethyldisiloxane plasma

نویسندگان

چکیده

Abstract In a dusty plasma, nanometer-sized solid dust particles can be grown by the polymerization of plasma species from reactive precursor gas. This type found in large-scale astrophysical objects, as well semiconductor manufacturing and material processing. laboratory environment, parameters carefully controlled dynamics growth interaction between studied. this work, we investigate cyclic low-pressure, radio-frequency driven argon-hexamethyldisiloxane using multitude diagnostics time-synchronized fashion. The combination microwave cavity resonance spectroscopy, impedance measurements, laser light scattering, extinction measurements optical emission spectroscopy offers broad view on temporal behavior concert with plasma-grown particles. We have studied variation several discharge such power hexamethyldisiloxane content. Therefore, multi-diagnostic approach contributes to fundamental understanding mechanisms behind low-pressure plasmas.

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ژورنال

عنوان ژورنال: Journal of Physics D

سال: 2022

ISSN: ['1361-6463', '0022-3727']

DOI: https://doi.org/10.1088/1361-6463/ac802a